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Modelling of Microfabrication Systems (e-bog) af Dai, Weizhong
Dai, Weizhong (forfatter)

Modelling of Microfabrication Systems e-bog

1240,73 DKK (inkl. moms 1550,91 DKK)
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
E-bog 1240,73 DKK
Kan læses i vores apps til iPhone/iPad og Android.
Forfattere Dai, Weizhong (forfatter)
Forlag Springer
Udgivet 9 marts 2013
Genrer PBKS
Sprog English
Format pdf
Beskyttelse LCP
ISBN 9783662087923

Beskrivelse

This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.