Physics of Radiofrequency Capacitive Discharge e-bog
403,64 DKK
(inkl. moms 504,55 DKK)
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of th...
E-bog
403,64 DKK
Forlag
CRC Press
Udgivet
23 maj 2018
Længde
322 sider
Genrer
PHFP
Sprog
English
Format
pdf
Beskyttelse
LCP
ISBN
9780429894237
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.