Ion Implantation Science and Technology (e-bog) af -
Ziegler, J.F. (redaktør)

Ion Implantation Science and Technology e-bog

436,85 DKK (inkl. moms 546,06 DKK)
Ion Implantation Science and Technology: Second Edition, just like the first edition, serves as both an introduction and tutorial to the science, techniques, and machines involved in the subject. The book is divided into two parts - Part 1: Ion Implantation Science and Part 2: Ion Implantation Technology. Part 1 covers topics such as the stopping and range of ions in solids; ion implantation d...
E-bog 436,85 DKK
Forfattere Ziegler, J.F. (redaktør)
Udgivet 2 december 2012
Længde 508 sider
Genrer Atomic and molecular physics
Sprog English
Format pdf
Beskyttelse LCP
ISBN 9780323161657
Ion Implantation Science and Technology: Second Edition, just like the first edition, serves as both an introduction and tutorial to the science, techniques, and machines involved in the subject. The book is divided into two parts - Part 1: Ion Implantation Science and Part 2: Ion Implantation Technology. Part 1 covers topics such as the stopping and range of ions in solids; ion implantation damage in silicon; experimental annealing and activation; and the measurement on ion implantation. Part 2 includes ion optics and focusing on implanter design; photoresist problems and particle contamination; ion implantation diagnostics and process control; and emission of ionizing radiation from ion implanters. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.