Adhesion Aspects in MEMS/NEMS e-bog
509,93 DKK
(inkl. moms 637,41 DKK)
Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects
E-bog
509,93 DKK
Forlag
CRC Press
Udgivet
18 februar 2011
Længde
420 sider
Genrer
Chemistry
Sprog
English
Format
pdf
Beskyttelse
LCP
ISBN
9789004190955
Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects