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Mittal, Kash L. (redaktør)

Adhesion Aspects in MEMS/NEMS e-bog

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Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects
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Forfattere Mittal, Kash L. (redaktør)
Forlag CRC Press
Udgivet 18.02.2011
Længde 420 sider
Genrer Chemistry
Sprog English
Format pdf
Beskyttelse LCP
ISBN 9789004190955

Beskrivelse

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects