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  3. Atomic Layer Deposition for Semiconductors
Atomic Layer Deposition for Semiconductors (e-bog) af -
Hwang, Cheol Seong (redaktør)

Atomic Layer Deposition for Semiconductors e-bog

1240,73 DKK (inkl. moms 1550,91 DKK)
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
E-bog 1240,73 DKK
Kan læses i vores apps til iPhone/iPad og Android.
Forfattere Hwang, Cheol Seong (redaktør)
Forlag Springer
Udgivet 18 oktober 2013
Genrer PNRH
Sprog English
Format pdf
Beskyttelse LCP
ISBN 9781461480549

Beskrivelse

Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.