Scanning Probe Lithography e-bog
802,25 DKK
(inkl. moms 1002,81 DKK)
The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-...
E-bog
802,25 DKK
Forlag
CRC Press
Udgivet
22 december 2022
Længde
128 sider
Genrer
TBN
Sprog
English
Format
epub
Beskyttelse
LCP
ISBN
9781000804911
The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials. Introduces historical background of SPL, including evolution of the technique and tools Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied Shows the different types of devices and structures fabricated by SPL, together with the processing steps Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups Summarizes strengths, limitations, and potential of SPL This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.