Wafer Manufacturing e-bog
1021,49 DKK
(inkl. moms 1276,86 DKK)
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
E-bog
1021,49 DKK
Forlag
Wiley
Udgivet
31 december 2020
Genrer
Mechanical engineering and materials
Sprog
English
Format
pdf
Beskyttelse
LCP
ISBN
9781118696255
Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.