Thin Film Processes e-bog
436,85 DKK
(inkl. moms 546,06 DKK)
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to ...
E-bog
436,85 DKK
Forlag
Academic Press
Udgivet
2 december 2012
Længde
564 sider
Genrer
Materials science
Sprog
English
Format
pdf
Beskyttelse
LCP
ISBN
9780323138987
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.