Metal Impurities in Silicon- and Germanium-Based Technologies e-bog
1313,81 DKK
(inkl. moms 1642,26 DKK)
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are add...
E-bog
1313,81 DKK
Forlag
Springer
Udgivet
13 august 2018
Genrer
TGMM
Sprog
English
Format
pdf
Beskyttelse
LCP
ISBN
9783319939254
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.