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Micro and Nano Fabrication (e-bog) af Leuthold, Jurg
Leuthold, Jurg (forfatter)

Micro and Nano Fabrication e-bog

692,63 DKK (inkl. moms 865,79 DKK)
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization ...
E-bog 692,63 DKK
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Forfattere Leuthold, Jurg (forfatter)
Forlag Springer
Udgivet 2 januar 2015
Genrer Production and industrial engineering
Sprog English
Format pdf
Beskyttelse LCP
ISBN 9783662443958

Beskrivelse

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.