Lithography e-bog
1386,89 DKK
(inkl. moms 1733,61 DKK)
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic c...
E-bog
1386,89 DKK
Forlag
Wiley-ISTE
Udgivet
4 marts 2013
Genrer
Electronics and communications engineering
Sprog
English
Format
epub
Beskyttelse
LCP
ISBN
9781118621189
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.